Načítá se...
Nondestructive shape process monitoring of three-dimensional high aspect ratio targets using through-focus scanning optical microscopy
Low-cost, high-throughput and nondestructive metrology of truly three-dimensional (3-D) targets for process control/monitoring is a critically needed enabling technology for high-volume manufacturing (HVM) of nano/micro technologies in multi-disciplinary areas. In particular, a survey of the typical...
Uloženo v:
| Vydáno v: | Meas Sci Technol |
|---|---|
| Hlavní autoři: | , , , , , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
2018
|
| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6512994/ https://ncbi.nlm.nih.gov/pubmed/31092982 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/1361-6501/aae4c2 |
| Tagy: |
Přidat tag
Žádné tagy, Buďte první, kdo otaguje tento záznam!
|