Attota, R. K., Kang, H., Scott, K., Allen, R., Vladar, A. E., & Bunday, B. (2018). Nondestructive shape process monitoring of three-dimensional high aspect ratio targets using through-focus scanning optical microscopy. Meas Sci Technol.

Attota, Ravi Kiran, Hyeonggon Kang, Keana Scott, Richard Allen, Andras E. Vladar, und Benjamin Bunday. "Nondestructive Shape Process Monitoring of Three-dimensional High Aspect Ratio Targets Using Through-focus Scanning Optical Microscopy." Meas Sci Technol 2018.

Attota, Ravi Kiran, et al. "Nondestructive Shape Process Monitoring of Three-dimensional High Aspect Ratio Targets Using Through-focus Scanning Optical Microscopy." Meas Sci Technol 2018.