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Noise analysis for through-focus scanning optical microscopy
A systematic noise-analysis study for optimizing data collection and data processing parameters for through-focus scanning optical microscopy (TSOM) is presented. TSOM is a three-dimensional shape metrology method that can achieve sub-nanometer measurement sensitivity by analyzing sets of images acq...
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| Publicado en: | Opt Lett |
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| Autor principal: | |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
2016
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4823012/ https://ncbi.nlm.nih.gov/pubmed/26872178 |
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