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Noise analysis for through-focus scanning optical microscopy

A systematic noise-analysis study for optimizing data collection and data processing parameters for through-focus scanning optical microscopy (TSOM) is presented. TSOM is a three-dimensional shape metrology method that can achieve sub-nanometer measurement sensitivity by analyzing sets of images acq...

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Detalles Bibliográficos
Publicado en:Opt Lett
Autor Principal: Attota, Ravikiran
Formato: Artigo
Idioma:Inglês
Publicado: 2016
Assuntos:
Acceso en liña:https://ncbi.nlm.nih.gov/pmc/articles/PMC4823012/
https://ncbi.nlm.nih.gov/pubmed/26872178
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