High-speed chromatic confocal microscopy using multispectral sensors for sub-micrometer-precision microscopic surface profilometry

A full-field chromatic confocal microscopy (CCM) using a multispectral sensor was developed for quasi-one-shot microscopic 3D surface measurement. An innovative optical configuration employs a digital micromirror device (DMD) and a multispectral sensor is used to realize CCM with full-field area sca...

全面介紹

書目詳細資料

Principais autores:	Liang-Chia Chen, Pei-Ju Tan, Guo-Wei Wu, Chih-Jer Lin, Duc Trung Nguyen
格式:	Artigo
語言:	Inglês
出版:	Elsevier 2021-12-01
叢編:	Measurement: Sensors
主題:	Chromatic confocal microscopy Multispectral sensor Optical metrology Digital micromirror device Automated optical inspection (AOI)
在線閱讀:	http://www.sciencedirect.com/science/article/pii/S2665917421001288
標簽:	添加標簽 沒有標簽, 成為第一個標記此記錄!