High-speed chromatic confocal microscopy using multispectral sensors for sub-micrometer-precision microscopic surface profilometry
A full-field chromatic confocal microscopy (CCM) using a multispectral sensor was developed for quasi-one-shot microscopic 3D surface measurement. An innovative optical configuration employs a digital micromirror device (DMD) and a multispectral sensor is used to realize CCM with full-field area sca...
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| Автори: | , , , , |
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| Формат: | Artigo |
| Мова: | Inglês |
| Опубліковано: |
Elsevier
2021-12-01
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| Серія: | Measurement: Sensors |
| Предмети: | |
| Онлайн доступ: | http://www.sciencedirect.com/science/article/pii/S2665917421001288 |
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