High-speed chromatic confocal microscopy using multispectral sensors for sub-micrometer-precision microscopic surface profilometry

A full-field chromatic confocal microscopy (CCM) using a multispectral sensor was developed for quasi-one-shot microscopic 3D surface measurement. An innovative optical configuration employs a digital micromirror device (DMD) and a multispectral sensor is used to realize CCM with full-field area sca...

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Detalhes bibliográficos

Principais autores:	Liang-Chia Chen, Pei-Ju Tan, Guo-Wei Wu, Chih-Jer Lin, Duc Trung Nguyen
Formato:	Artigo
Idioma:	Inglês
Publicado em:	Elsevier 2021-12-01
coleção:	Measurement: Sensors
Assuntos:	Chromatic confocal microscopy Multispectral sensor Optical metrology Digital micromirror device Automated optical inspection (AOI)
Acesso em linha:	http://www.sciencedirect.com/science/article/pii/S2665917421001288
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