High-speed chromatic confocal microscopy using multispectral sensors for sub-micrometer-precision microscopic surface profilometry

A full-field chromatic confocal microscopy (CCM) using a multispectral sensor was developed for quasi-one-shot microscopic 3D surface measurement. An innovative optical configuration employs a digital micromirror device (DMD) and a multispectral sensor is used to realize CCM with full-field area sca...

Ausführliche Beschreibung

Bibliografische Detailangaben

Hauptverfasser:	Liang-Chia Chen, Pei-Ju Tan, Guo-Wei Wu, Chih-Jer Lin, Duc Trung Nguyen
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	Elsevier 2021-12-01
Schriftenreihe:	Measurement: Sensors
Schlagworte:	Chromatic confocal microscopy Multispectral sensor Optical metrology Digital micromirror device Automated optical inspection (AOI)
Online-Zugang:	http://www.sciencedirect.com/science/article/pii/S2665917421001288
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