High-speed chromatic confocal microscopy using multispectral sensors for sub-micrometer-precision microscopic surface profilometry

A full-field chromatic confocal microscopy (CCM) using a multispectral sensor was developed for quasi-one-shot microscopic 3D surface measurement. An innovative optical configuration employs a digital micromirror device (DMD) and a multispectral sensor is used to realize CCM with full-field area sca...

Descripció completa

Dades bibliogràfiques

Autors principals:	Liang-Chia Chen, Pei-Ju Tan, Guo-Wei Wu, Chih-Jer Lin, Duc Trung Nguyen
Format:	Artigo
Idioma:	Inglês
Publicat:	Elsevier 2021-12-01
Col·lecció:	Measurement: Sensors
Matèries:	Chromatic confocal microscopy Multispectral sensor Optical metrology Digital micromirror device Automated optical inspection (AOI)
Accés en línia:	http://www.sciencedirect.com/science/article/pii/S2665917421001288
Etiquetes:	Afegir etiqueta Sense etiquetes, Sigues el primer a etiquetar aquest registre!