High-speed chromatic confocal microscopy using multispectral sensors for sub-micrometer-precision microscopic surface profilometry
A full-field chromatic confocal microscopy (CCM) using a multispectral sensor was developed for quasi-one-shot microscopic 3D surface measurement. An innovative optical configuration employs a digital micromirror device (DMD) and a multispectral sensor is used to realize CCM with full-field area sca...
Kaydedildi:
| Asıl Yazarlar: | , , , , |
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| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
Elsevier
2021-12-01
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| Seri Bilgileri: | Measurement: Sensors |
| Konular: | |
| Online Erişim: | http://www.sciencedirect.com/science/article/pii/S2665917421001288 |
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