Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements
Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading he...
Збережено в:
| Автори: | , , , , , |
|---|---|
| Формат: | Artigo |
| Мова: | Inglês |
| Опубліковано: |
MDPI AG
2022-11-01
|
| Серія: | Photonics |
| Предмети: | |
| Онлайн доступ: | https://www.mdpi.com/2304-6732/9/11/830 |
| Теги: |
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|