Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements
Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading he...
Zapisane w:
| Główni autorzy: | , , , , , |
|---|---|
| Format: | Artigo |
| Język: | Inglês |
| Wydane: |
MDPI AG
2022-11-01
|
| Seria: | Photonics |
| Hasła przedmiotowe: | |
| Dostęp online: | https://www.mdpi.com/2304-6732/9/11/830 |
| Etykiety: |
Nie ma etykietki, Dołącz pierwszą etykiete!
|