Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements
Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading he...
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| Format: | Artigo |
| Sprache: | Inglês |
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MDPI AG
2022-11-01
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| Schriftenreihe: | Photonics |
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| Online-Zugang: | https://www.mdpi.com/2304-6732/9/11/830 |
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