Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements
Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading he...
I tiakina i:
| Ngā kaituhi matua: | , , , , , |
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| Hōputu: | Artigo |
| Reo: | Inglês |
| I whakaputaina: |
MDPI AG
2022-11-01
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| Rangatū: | Photonics |
| Ngā marau: | |
| Urunga tuihono: | https://www.mdpi.com/2304-6732/9/11/830 |
| Ngā Tūtohu: |
Kāore He Tūtohu, Me noho koe te mea tuatahi ki te tūtohu i tēnei pūkete!
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