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Spatially Separated Heterodyne Grating Interferometer for In-Plane and Out-of-Plane Displacement Measurements

Grating interferometers that measure in-plane and out-of-plane displacements are not only effective two-degree-of-freedom (DOF) sensors, but are also basic units of six-DOF measurement systems. Besides resolution and accuracy, periodic nonlinear errors, misalignment tolerance, and size of reading he...

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Main Authors: Di Chang, Ziqi Yin, Yunke Sun, Pengcheng Hu, Jiubin Tan, Zhigang Fan
Format: Artigo
Language:Inglês
Published: MDPI AG 2022-11-01
Series:Photonics
Subjects:
grating interferometry
heterodyne interferometry
displacement measurement
Online Access:https://www.mdpi.com/2304-6732/9/11/830
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