Ciliary motion in PECVD silicon carbide and silicon oxynitride microstructures
The development of arrays of amorphous hydrogenated silicon carbide (a–SiC:H) and silicon oxynitride (SiOxNy) based microstructures that produce ciliary motion is presented. The arrays are fabricated by bulk micromachining of c–Si substrates and they are completely based on materials obtained by a l...
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| Gepubliceerd in: | Revista Mexicana de Física |
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| Hoofdauteurs: | , |
| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
Sociedad Mexicana de Física A.C.
2006
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| Onderwerpen: | |
| Online toegang: | https://www.redalyc.org/articulo.oa?id=57028295015 |
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