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Ciliary motion in PECVD silicon carbide and silicon oxynitride microstructures
The development of arrays of amorphous hydrogenated silicon carbide (a–SiC:H) and silicon oxynitride (SiOxNy) based microstructures that produce ciliary motion is presented. The arrays are fabricated by bulk micromachining of c–Si substrates and they are completely based on materials obtained by a l...
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| Publicado no: | Revista Mexicana de Física |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Sociedad Mexicana de Física A.C.
2006
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| Assuntos: | |
| Acesso em linha: | https://www.redalyc.org/articulo.oa?id=57028295015 |
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