Ciliary motion in PECVD silicon carbide and silicon oxynitride microstructures
The development of arrays of amorphous hydrogenated silicon carbide (a–SiC:H) and silicon oxynitride (SiOxNy) based microstructures that produce ciliary motion is presented. The arrays are fabricated by bulk micromachining of c–Si substrates and they are completely based on materials obtained by a l...
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| Publicado en: | Revista Mexicana de Física |
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| Principais autores: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Sociedad Mexicana de Física A.C.
2006
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| Assuntos: | |
| Acceso en liña: | https://www.redalyc.org/articulo.oa?id=57028295015 |
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