Ciliary motion in PECVD silicon carbide and silicon oxynitride microstructures
The development of arrays of amorphous hydrogenated silicon carbide (a–SiC:H) and silicon oxynitride (SiOxNy) based microstructures that produce ciliary motion is presented. The arrays are fabricated by bulk micromachining of c–Si substrates and they are completely based on materials obtained by a l...
保存先:
| 出版年: | Revista Mexicana de Física |
|---|---|
| 主要な著者: | , |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Sociedad Mexicana de Física A.C.
2006
|
| 主題: | |
| オンライン･アクセス: | https://www.redalyc.org/articulo.oa?id=57028295015 |
| タグ: |
タグなし, このレコードへの初めてのタグを付けませんか!
|