Ciliary motion in PECVD silicon carbide and silicon oxynitride microstructures
The development of arrays of amorphous hydrogenated silicon carbide (a–SiC:H) and silicon oxynitride (SiOxNy) based microstructures that produce ciliary motion is presented. The arrays are fabricated by bulk micromachining of c–Si substrates and they are completely based on materials obtained by a l...
Salvato in:
| Pubblicato in: | Revista Mexicana de Física |
|---|---|
| Autori principali: | , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Sociedad Mexicana de Física A.C.
2006
|
| Soggetti: | |
| Accesso online: | https://www.redalyc.org/articulo.oa?id=57028295015 |
| Tags: |
Nessun Tag, puoi essere il primo ad aggiungerne!!
|