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Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS–MEMS Technique
This study describes the fabrication of an ammonia gas sensor (AGS) using a complementary metal oxide semiconductor (CMOS)–microelectromechanical system (MEMS) technique. The structure of the AGS features interdigitated electrodes (IDEs) and a sensing material on a silicon substrate. The IDEs are th...
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| Publicado no: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7019987/ https://ncbi.nlm.nih.gov/pubmed/31952151 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11010092 |
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