Llwytho...
Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators
This work presents a thermoelectric micro generator fabricated by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and the post-CMOS process. The micro generator is composed of 24 thermocouples in series. Each thermocouple is constructed by p-type and n-type polysilicon...
Wedi'i Gadw mewn:
| Prif Awduron: | , , , |
|---|---|
| Fformat: | Artigo |
| Iaith: | Inglês |
| Cyhoeddwyd: |
Molecular Diversity Preservation International (MDPI)
2010
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| Pynciau: | |
| Mynediad Ar-lein: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3244015/ https://ncbi.nlm.nih.gov/pubmed/22205869 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s100201315 |
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