ロード中...
Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators
This work presents a thermoelectric micro generator fabricated by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and the post-CMOS process. The micro generator is composed of 24 thermocouples in series. Each thermocouple is constructed by p-type and n-type polysilicon...
保存先:
| 主要な著者: | , , , |
|---|---|
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Molecular Diversity Preservation International (MDPI)
2010
|
| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3244015/ https://ncbi.nlm.nih.gov/pubmed/22205869 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s100201315 |
| タグ: |
タグ追加
タグなし, このレコードへの初めてのタグを付けませんか!
|