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Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators

This work presents a thermoelectric micro generator fabricated by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and the post-CMOS process. The micro generator is composed of 24 thermocouples in series. Each thermocouple is constructed by p-type and n-type polysilicon...

Täydet tiedot

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Bibliografiset tiedot
Päätekijät: Kao, Pin-Hsu, Shih, Po-Jen, Dai, Ching-Liang, Liu, Mao-Chen
Aineistotyyppi: Artigo
Kieli:Inglês
Julkaistu: Molecular Diversity Preservation International (MDPI) 2010
Aiheet:
Linkit:https://ncbi.nlm.nih.gov/pmc/articles/PMC3244015/
https://ncbi.nlm.nih.gov/pubmed/22205869
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s100201315
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