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Manufacturing and Testing of Radio Frequency MEMS Switches Using the Complementary Metal Oxide Semiconductor Process

A radio frequency microelectromechanical system switch (MSS) manufactured by the complementary metal oxide semiconductor (CMOS) process is presented. The MSS is a capacitive shunt type. Structure for the MSS consists of coplanar waveguide (CPW) lines, a membrane, and springs. The membrane locates ov...

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Vydáno v:Sensors (Basel)
Hlavní autoři: Tsai, Zung-You, Shih, Po-Jen, Tsai, Yao-Chuan, Dai, Ching-Liang
Médium: Artigo
Jazyk:Inglês
Vydáno: MDPI 2021
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC7922824/
https://ncbi.nlm.nih.gov/pubmed/33671232
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s21041396
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