Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique

This study presents the fabrication of a polyaniline nanofiber ammonia sensor integrated with a readout circuit on a chip using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The micro ammonia sensor consists of a sensing resistor and an ammonia sen...

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Bibliographic Details
Main Authors: Liu, Mao-Chen, Dai, Ching-Liang, Chan, Chih-Hua, Wu, Chyan-Chyi
Format: Artigo
Language:Inglês
Published: Molecular Diversity Preservation International (MDPI) 2009
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Article
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC3280836/
https://ncbi.nlm.nih.gov/pubmed/22399944
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s90200869
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