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Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique
The design and fabrication of an ethanol microsensor integrated with a readout circuit on-a-chip using the complementary metal oxide semiconductor (CMOS)-microelectro-mechanical system (MEMS) technique are investigated. The ethanol sensor is made up of a heater, a sensitive film and interdigitated e...
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| Publicado no: | Sensors (Basel) |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2015
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4327095/ https://ncbi.nlm.nih.gov/pubmed/25594598 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150101623 |
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