Caricamento...
Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique
The design and fabrication of an ethanol microsensor integrated with a readout circuit on-a-chip using the complementary metal oxide semiconductor (CMOS)-microelectro-mechanical system (MEMS) technique are investigated. The ethanol sensor is made up of a heater, a sensitive film and interdigitated e...
Salvato in:
| Pubblicato in: | Sensors (Basel) |
|---|---|
| Autori principali: | , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2015
|
| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4327095/ https://ncbi.nlm.nih.gov/pubmed/25594598 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150101623 |
| Tags: |
Aggiungi Tag
Nessun Tag, puoi essere il primo ad aggiungerne! !
|