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A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip
A zinc oxide nanorod ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process was investigated. The structure of the ammonia sensor is composed of a sensitive film and polysilicon electrodes. The am...
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| Autores principales: | , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2011
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3251973/ https://ncbi.nlm.nih.gov/pubmed/22247656 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s111211112 |
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