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Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip

The study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film of the sensor is a composite cobalt oxide nanosheet and carbon nanotub...

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Detalhes bibliográficos
Main Authors: Dai, Ching-Liang, Chen, Yen-Chi, Wu, Chyan-Chyi, Kuo, Chin-Fu
Formato: Artigo
Idioma:Inglês
Publicado em: Molecular Diversity Preservation International (MDPI) 2010
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3264449/
https://ncbi.nlm.nih.gov/pubmed/22294897
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s100301753
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