ロード中...
Influence of argon plasma on the deposition of Al(2)O(3) film onto the PET surfaces by atomic layer deposition
In this paper, polyethyleneterephthalate (PET) films with and without plasma pretreatment were modified by atomic layer deposition (ALD) and plasma-assisted atomic layer deposition (PA-ALD). It demonstrates that the Al(2)O(3) films are successfully deposited onto the surface of PET films. The cracks...
保存先:
| 主要な著者: | , , , , |
|---|---|
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Springer
2013
|
| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3608948/ https://ncbi.nlm.nih.gov/pubmed/23413804 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-79 |
| タグ: |
タグ追加
タグなし, このレコードへの初めてのタグを付けませんか!
|