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Influence of argon plasma on the deposition of Al(2)O(3) film onto the PET surfaces by atomic layer deposition
In this paper, polyethyleneterephthalate (PET) films with and without plasma pretreatment were modified by atomic layer deposition (ALD) and plasma-assisted atomic layer deposition (PA-ALD). It demonstrates that the Al(2)O(3) films are successfully deposited onto the surface of PET films. The cracks...
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| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2013
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3608948/ https://ncbi.nlm.nih.gov/pubmed/23413804 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-79 |
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