Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition

The tuning of structural, optical, and electrical properties of Al-doped ZnO films deposited by atomic layer deposition technique is reported in this work. With the increasing Al doping level, the evolution from (002) to (100) diffraction peaks indicates the change in growth mode of ZnO films. Spect...

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Bibliographic Details
Published in:Nanoscale Res Lett
Main Authors: Zhai, Chen-Hui, Zhang, Rong-Jun, Chen, Xin, Zheng, Yu-Xiang, Wang, Song-You, Liu, Juan, Dai, Ning, Chen, Liang-Yao
Format: Artigo
Language:Inglês
Published: Springer US 2016
Subjects:
Nano Express
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC5026983/
https://ncbi.nlm.nih.gov/pubmed/27639580
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-016-1625-0
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