Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition

The tuning of structural, optical, and electrical properties of Al-doped ZnO films deposited by atomic layer deposition technique is reported in this work. With the increasing Al doping level, the evolution from (002) to (100) diffraction peaks indicates the change in growth mode of ZnO films. Spect...

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發表在:Nanoscale Res Lett
Main Authors: Zhai, Chen-Hui, Zhang, Rong-Jun, Chen, Xin, Zheng, Yu-Xiang, Wang, Song-You, Liu, Juan, Dai, Ning, Chen, Liang-Yao
格式: Artigo
語言:Inglês
出版: Springer US 2016
主題:
Nano Express
在線閱讀:https://ncbi.nlm.nih.gov/pmc/articles/PMC5026983/
https://ncbi.nlm.nih.gov/pubmed/27639580
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-016-1625-0
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