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Influence of argon plasma on the deposition of Al(2)O(3) film onto the PET surfaces by atomic layer deposition

In this paper, polyethyleneterephthalate (PET) films with and without plasma pretreatment were modified by atomic layer deposition (ALD) and plasma-assisted atomic layer deposition (PA-ALD). It demonstrates that the Al(2)O(3) films are successfully deposited onto the surface of PET films. The cracks...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Edy, Riyanto, Huang, Xiaojiang, Guo, Ying, Zhang, Jing, Shi, Jianjun
Format: Artigo
Sprache:Inglês
Veröffentlicht: Springer 2013
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3608948/
https://ncbi.nlm.nih.gov/pubmed/23413804
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-79
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