Nanocrystalline GaN and GaN:H Films Grown by RF-Magnetron Sputtering
The structural and optical properties of nanocrystalline GaN and GaN:H films grown by RF-magnetronsputtering are focused here. The films were grown using a Ga target and a variety of deposition parameters(N2/H2/Arflow rates, RF power, and substrate temperatures). Si (100) and fused silica substrates...
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| Wydane w: | Brazilian Journal of Physics |
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| Główni autorzy: | , , , |
| Format: | Artigo |
| Język: | Inglês |
| Wydane: |
Sociedade Brasileira de Física
2006
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| Hasła przedmiotowe: | |
| Dostęp online: | https://www.redalyc.org/articulo.oa?id=46436548 |
| Etykiety: |
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