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Characterization of diamond-like carbon (DLC) thin films prepared by r.f. magnetron sputtering
Diamond-Like Carbon (DLC) thin films were deposited on stainless steel and silicon substrates by a r.f. (13.56 MHz) magnetron sputtering technique. A carbon target (99,99%) and a gas mixture of Ar/CH4 were used. During the deposition process the plasma discharge was monitored by Optical Emission Sp...
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| Publicado en: | Superficies y vacío |
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| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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| Assuntos: | |
| Acceso en liña: | https://www.redalyc.org/articulo.oa?id=94200970 |
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