Caricamento...
Characterization of diamond-like carbon (DLC) thin films prepared by r.f. magnetron sputtering
Diamond-Like Carbon (DLC) thin films were deposited on stainless steel and silicon substrates by a r.f. (13.56 MHz) magnetron sputtering technique. A carbon target (99,99%) and a gas mixture of Ar/CH4 were used. During the deposition process the plasma discharge was monitored by Optical Emission Sp...
Salvato in:
| Pubblicato in: | Superficies y vacío |
|---|---|
| Autori principali: | , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
|
| Soggetti: | |
| Accesso online: | https://www.redalyc.org/articulo.oa?id=94200970 |
| Tags: |
Aggiungi Tag
Nessun Tag, puoi essere il primo ad aggiungerne! !
|