Fabrication and Characterization of Black GaAs Nanoarrays via ICP Etching

GaAs nanostructures have attracted more and more attention due to its excellent properties such as increasing photon absorption. The fabrication process on GaAs substrate was rarely reported, and most of the preparation processes are complex. Here, we report a black GaAs fabrication process using a...

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Shranjeno v:
Bibliografske podrobnosti
izdano v:Nanoscale Res Lett
Main Authors: Ma, Jing, Zhao, Yongqiang, Liu, Wen, Song, Peishuai, Yang, Liangliang, Wei, Jiangtao, Yang, Fuhua, Wang, Xiaodong
Format: Artigo
Jezik:Inglês
Izdano: Springer US 2021
Teme:
Nano Express
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC7818367/
https://ncbi.nlm.nih.gov/pubmed/33475898
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-021-03479-1
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