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Fundamental role of arsenic flux in nanohole formation by Ga droplet etching on GaAs(001)

Nanoholes with a depth in the range of tens of nanometers can be formed on GaAs(001) surfaces at a temperature of 500°C by local etching after Ga droplet formation. In this work, we demonstrate that the local etching or nanodrilling process starts when the Ga droplets are exposed to arsenic. The ess...

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Detalhes bibliográficos
Main Authors: Fuster, David, González, Yolanda, González, Luisa
Formato: Artigo
Idioma:Inglês
Publicado em: Springer 2014
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4071335/
https://ncbi.nlm.nih.gov/pubmed/24994962
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-309
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