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Au-Capped GaAs Nanopillar Arrays Fabricated by Metal-Assisted Chemical Etching

GaAs nanopillar arrays were successfully fabricated by metal-assisted chemical etching using Au nanodot arrays. The nanodot arrays were formed on substrates by vacuum deposition through a porous alumina mask with an ordered array of openings. By using an etchant with a high acid concentration and lo...

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Bibliografske podrobnosti
izdano v:Nanoscale Res Lett
Main Authors: Asoh, Hidetaka, Imai, Ryota, Hashimoto, Hideki
Format: Artigo
Jezik:Inglês
Izdano: Springer US 2017
Teme:
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC5498430/
https://ncbi.nlm.nih.gov/pubmed/28683539
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-017-2219-1
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