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Au-Capped GaAs Nanopillar Arrays Fabricated by Metal-Assisted Chemical Etching
GaAs nanopillar arrays were successfully fabricated by metal-assisted chemical etching using Au nanodot arrays. The nanodot arrays were formed on substrates by vacuum deposition through a porous alumina mask with an ordered array of openings. By using an etchant with a high acid concentration and lo...
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| Vydáno v: | Nanoscale Res Lett |
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| Hlavní autoři: | , , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
Springer US
2017
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5498430/ https://ncbi.nlm.nih.gov/pubmed/28683539 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-017-2219-1 |
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