Fabrication and Characterization of Black GaAs Nanoarrays via ICP Etching

GaAs nanostructures have attracted more and more attention due to its excellent properties such as increasing photon absorption. The fabrication process on GaAs substrate was rarely reported, and most of the preparation processes are complex. Here, we report a black GaAs fabrication process using a...

Disgrifiad llawn

Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Cyhoeddwyd yn:Nanoscale Res Lett
Prif Awduron: Ma, Jing, Zhao, Yongqiang, Liu, Wen, Song, Peishuai, Yang, Liangliang, Wei, Jiangtao, Yang, Fuhua, Wang, Xiaodong
Fformat: Artigo
Iaith:Inglês
Cyhoeddwyd: Springer US 2021
Pynciau:
Nano Express
Mynediad Ar-lein:https://ncbi.nlm.nih.gov/pmc/articles/PMC7818367/
https://ncbi.nlm.nih.gov/pubmed/33475898
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-021-03479-1
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