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Fabrication and Characterization of Black GaAs Nanoarrays via ICP Etching
GaAs nanostructures have attracted more and more attention due to its excellent properties such as increasing photon absorption. The fabrication process on GaAs substrate was rarely reported, and most of the preparation processes are complex. Here, we report a black GaAs fabrication process using a...
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| Publicado no: | Nanoscale Res Lett |
|---|---|
| Main Authors: | , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer US
2021
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7818367/ https://ncbi.nlm.nih.gov/pubmed/33475898 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-021-03479-1 |
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