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Fabrication and Characterization of Black GaAs Nanoarrays via ICP Etching
GaAs nanostructures have attracted more and more attention due to its excellent properties such as increasing photon absorption. The fabrication process on GaAs substrate was rarely reported, and most of the preparation processes are complex. Here, we report a black GaAs fabrication process using a...
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| Publié dans: | Nanoscale Res Lett |
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| Auteurs principaux: | , , , , , , , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
Springer US
2021
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7818367/ https://ncbi.nlm.nih.gov/pubmed/33475898 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-021-03479-1 |
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