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Anomalous Properties of the Dislocation-Free Interface between Si(111) Substrate and 3C-SiC(111) Epitaxial Layer

Thin films of single-crystal silicon carbide of cubic polytype with a thickness of 40–100 nm, which were grown from the silicon substrate material by the method of coordinated substitution of atoms by a chemical reaction of silicon with carbon monoxide CO gas, have been studied by spectral ellipsome...

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Publicado en:Materials (Basel)
Main Authors: Kukushkin, Sergey A., Osipov, Andrey V.
Formato: Artigo
Idioma:Inglês
Publicado: MDPI 2020
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Acceso en liña:https://ncbi.nlm.nih.gov/pmc/articles/PMC7795334/
https://ncbi.nlm.nih.gov/pubmed/33375252
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma14010078
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