State of the Art and Future Perspectives in Advanced CMOS Technology

The international technology roadmap of semiconductors (ITRS) is approaching the historical end point and we observe that the semiconductor industry is driving complementary metal oxide semiconductor (CMOS) further towards unknown zones. Today’s transistors with 3D structure and integrated advanced...

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Bibliografiske detaljer
Udgivet i:Nanomaterials (Basel)
Main Authors: Radamson, Henry H., Zhu, Huilong, Wu, Zhenhua, He, Xiaobin, Lin, Hongxiao, Liu, Jinbiao, Xiang, Jinjuan, Kong, Zhenzhen, Xiong, Wenjuan, Li, Junjie, Cui, Hushan, Gao, Jianfeng, Yang, Hong, Du, Yong, Xu, Buqing, Li, Ben, Zhao, Xuewei, Yu, Jiahan, Dong, Yan, Wang, Guilei
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2020
Fag:
Review
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7466708/
https://ncbi.nlm.nih.gov/pubmed/32784801
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano10081555
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