State of the Art and Future Perspectives in Advanced CMOS Technology

The international technology roadmap of semiconductors (ITRS) is approaching the historical end point and we observe that the semiconductor industry is driving complementary metal oxide semiconductor (CMOS) further towards unknown zones. Today’s transistors with 3D structure and integrated advanced...

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Detalles Bibliográficos
Publicado en:Nanomaterials (Basel)
Main Authors: Radamson, Henry H., Zhu, Huilong, Wu, Zhenhua, He, Xiaobin, Lin, Hongxiao, Liu, Jinbiao, Xiang, Jinjuan, Kong, Zhenzhen, Xiong, Wenjuan, Li, Junjie, Cui, Hushan, Gao, Jianfeng, Yang, Hong, Du, Yong, Xu, Buqing, Li, Ben, Zhao, Xuewei, Yu, Jiahan, Dong, Yan, Wang, Guilei
Formato: Artigo
Idioma:Inglês
Publicado: MDPI 2020
Assuntos:
Review
Acceso en liña:https://ncbi.nlm.nih.gov/pmc/articles/PMC7466708/
https://ncbi.nlm.nih.gov/pubmed/32784801
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano10081555
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