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Effect of Various Defects on 4H-SiC Schottky Diode Performance and Its Relation to Epitaxial Growth Conditions

In this paper, the chemical vapor deposition (CVD) processing for 4H-SiC epilayer is investigated with particular emphasis on the defects and the noise properties. It is experimentally found that the process parameters of C/Si ratio strongly affect the surface roughness of epilayers and the density...

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Bibliografiske detaljer
Udgivet i:Micromachines (Basel)
Main Authors: Li, Jinlan, Meng, Chenxu, Yu, Le, Li, Yun, Yan, Feng, Han, Ping, Ji, Xiaoli
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2020
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7345170/
https://ncbi.nlm.nih.gov/pubmed/32599702
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11060609
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