Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT

Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with readout circuits. This paper presents a new approach in...

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Detalles Bibliográficos
Publicado en:Sensors (Basel)
Autores principales: Nazemi, Haleh, Antony Balasingam, Jenitha, Swaminathan, Siddharth, Ambrose, Kenson, Nathani, Muhammad Umair, Ahmadi, Tara, Babu Lopez, Yameema, Emadi, Arezoo
Formato: Artigo
Lenguaje:Inglês
Publicado: MDPI 2020
Materias:
Review
Acceso en línea:https://ncbi.nlm.nih.gov/pmc/articles/PMC7181234/
https://ncbi.nlm.nih.gov/pubmed/32260081
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20072010
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