Llwytho...
Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT
Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with readout circuits. This paper presents a new approach in...
Wedi'i Gadw mewn:
| Cyhoeddwyd yn: | Sensors (Basel) |
|---|---|
| Prif Awduron: | , , , , , , , |
| Fformat: | Artigo |
| Iaith: | Inglês |
| Cyhoeddwyd: |
MDPI
2020
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| Pynciau: | |
| Mynediad Ar-lein: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7181234/ https://ncbi.nlm.nih.gov/pubmed/32260081 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20072010 |
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