Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications

A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance...

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Autori principali: Jinlong Song, Chenyang Xue, Changde He, Rui Zhang, Linfeng Mu, Juan Cui, Jing Miao, Yuan Liu, Wendong Zhang
Natura: Artigo
Lingua:Inglês
Pubblicazione: MDPI AG 2015-09-01
Serie:Sensors
Soggetti:
CMUT
C-V characteristic curve
sound pressure
bandwidth
ultrasonic imaging
Accesso online:http://www.mdpi.com/1424-8220/15/9/23205
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