Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT

Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with readout circuits. This paper presents a new approach in...

Celý popis

Uloženo v:
Podrobná bibliografie
Vydáno v:Sensors (Basel)
Hlavní autoři: Nazemi, Haleh, Antony Balasingam, Jenitha, Swaminathan, Siddharth, Ambrose, Kenson, Nathani, Muhammad Umair, Ahmadi, Tara, Babu Lopez, Yameema, Emadi, Arezoo
Médium: Artigo
Jazyk:Inglês
Vydáno: MDPI 2020
Témata:
Review
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC7181234/
https://ncbi.nlm.nih.gov/pubmed/32260081
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20072010
Tagy: Přidat tag
Žádné tagy, Buďte první, kdo otaguje tento záznam!

Podobné jednotky