Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on si...

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Bibliographische Detailangaben
Veröffentlicht in:Sensors (Basel)
Hauptverfasser: Qiu, Yongqiang, Gigliotti, James V., Wallace, Margeaux, Griggio, Flavio, Demore, Christine E. M., Cochran, Sandy, Trolier-McKinstry, Susan
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI 2015
Schlagworte:
Review
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC4431219/
https://ncbi.nlm.nih.gov/pubmed/25855038
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150408020
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