Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on si...

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Опубликовано в: :Sensors (Basel)
Главные авторы: Qiu, Yongqiang, Gigliotti, James V., Wallace, Margeaux, Griggio, Flavio, Demore, Christine E. M., Cochran, Sandy, Trolier-McKinstry, Susan
Формат: Artigo
Язык:Inglês
Опубликовано: MDPI 2015
Предметы:
Review
Online-ссылка:https://ncbi.nlm.nih.gov/pmc/articles/PMC4431219/
https://ncbi.nlm.nih.gov/pubmed/25855038
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150408020
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