Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on si...

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Detalles Bibliográficos
Publicado en:Sensors (Basel)
Autores principales: Qiu, Yongqiang, Gigliotti, James V., Wallace, Margeaux, Griggio, Flavio, Demore, Christine E. M., Cochran, Sandy, Trolier-McKinstry, Susan
Formato: Artigo
Lenguaje:Inglês
Publicado: MDPI 2015
Materias:
Review
Acceso en línea:https://ncbi.nlm.nih.gov/pmc/articles/PMC4431219/
https://ncbi.nlm.nih.gov/pubmed/25855038
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150408020
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