Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on si...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: Qiu, Yongqiang, Gigliotti, James V., Wallace, Margeaux, Griggio, Flavio, Demore, Christine E. M., Cochran, Sandy, Trolier-McKinstry, Susan
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2015
Assuntos:
Review
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4431219/
https://ncbi.nlm.nih.gov/pubmed/25855038
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150408020
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