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Evaluation of High Frequency Piezoelectric Micromachined Ultrasound Transducers for Photoacoustic Imaging

In this work, the design, fabrication, and characterization of piezoelectric micromachined ultrasound transducer (PMUT) arrays for photoacoustic imaging applications are reported. An 80-element linear PMUT array with each element having 53 PMUT cells of 125 μm cell diameter were fabricated using 650...

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Detalhes bibliográficos
Publicado no:Proc IEEE Sens
Main Authors: Dangi, Ajay, Agrawal, Sumit, Tiwari, Sudhanshu, Jadhav, Shubham, Cheng, Christopher, Trolier-McKinstry, Susan, Pratap, Rudra, Kothapalli, Sri-Rajasekhar
Formato: Artigo
Idioma:Inglês
Publicado em: 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC6625760/
https://ncbi.nlm.nih.gov/pubmed/31303903
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/ICSENS.2018.8589733
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