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Evaluation of High Frequency Piezoelectric Micromachined Ultrasound Transducers for Photoacoustic Imaging
In this work, the design, fabrication, and characterization of piezoelectric micromachined ultrasound transducer (PMUT) arrays for photoacoustic imaging applications are reported. An 80-element linear PMUT array with each element having 53 PMUT cells of 125 μm cell diameter were fabricated using 650...
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| Veröffentlicht in: | Proc IEEE Sens |
|---|---|
| Hauptverfasser: | , , , , , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
2018
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6625760/ https://ncbi.nlm.nih.gov/pubmed/31303903 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/ICSENS.2018.8589733 |
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