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Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications
A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2015
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4610594/ https://ncbi.nlm.nih.gov/pubmed/26389902 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150923205 |
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