Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Underwater Imaging Applications

A capacitive micromachined ultrasonic transducer structure for use in underwater imaging is designed, fabricated and tested in this paper. In this structure, a silicon dioxide insulation layer is inserted between the top electrodes and the vibration membrane to prevent ohmic contact. The capacitance...

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Bibliographic Details
Published in:Sensors (Basel)
Main Authors: Song, Jinlong, Xue, Chenyang, He, Changde, Zhang, Rui, Mu, Linfeng, Cui, Juan, Miao, Jing, Liu, Yuan, Zhang, Wendong
Format: Artigo
Language:Inglês
Published: MDPI 2015
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Article
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC4610594/
https://ncbi.nlm.nih.gov/pubmed/26389902
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150923205
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